Apparatus for, and methods of, obtaining the movem

专利名称：Apparatus for, and methods of, obtaining

the movement of a substance to a substrate

发明人：Anderson, Roger W.,Roche, Gregory

A.,Weber, Ann M.

申请号：EP88106948.8申请日：19880429公开号：EP02963A1公开日：19881109

专利附图：

摘要：A beam of substantially coherent energy passes through an enclosure in adirection substantially parallel and contiguous to a substrate in the enclosure. A beam ofnon-coherent or substantially coherent energy is directed through the enclosure to thesubstrate in a direction transverse, but preferably perpendicular, to the substrate. Gasesintroduced into the enclosure combine to form a substance when subjected to theenergy from the beams. This substance moves to the substrate and affects the substrate.For example, gaseous molecules such as silane (SiH₄) and nitrous oxide (N₂O) introducedinto the enclosure in a direction substantially parallel and contiguous to the substratecombine to form silicon dioxide (SiO₂). The unreacted gases may be removed from the

enclosure after flowing past the substrate. A small amount of a donor gas of a particularone of the elements such as oxygen may be introduced into the enclosure in gaseousform, preferably in a direction substantially parallel and contiguous to the substrate andin a range of 0.1% - 5.0% by volume of the total volume of the gases. The amount of theoxygen may be sufficiently small so that there is no significant thermal reaction with thesilane. The beam of substantially coherent light may be pulsed at a rate dependent uponthe rate of flow of the element such as oxygen into the enclosure. By introducing thesmall amount of this element (e.g., oxygen) into the enclosure and pulsing the beam ofsubstantially coherent light, the deposition rate of the substance on the substrate maybe enhanced by as much as 30-40% and the quality (i.e. as indicated by its index ofrefraction) of the substance deposited on the substrate may be enhanced.

申请人：GENERAL SIGNAL CORPORATION

地址：PO Box 10010 High Ridge Park Stamford Connecticut 06904 US

国籍：US

代理机构：Baillie, Iain Cameron

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