METHOD AND APPARATUS FOR MEASURING THICKNESS OF TH

专利名称：METHOD AND APPARATUS FOR

MEASURING THICKNESS OF THIN FILMS VIATRANSIENT THERMOREFLECTANCE

发明人：MAZNEV, Alexei申请号：EP03775753.1申请日：20031210公开号：EP1573302A1公开日：20050914

摘要：It is a kind of measure film thickness be based on monitoring PULSE HEATINGcaudacoria reflectivity transient change heating. It the described method comprises thefollowing steps: pulsedly irradiating the surface of film with driving pulse, increase thetemperature of film; With the surface of detection beam irradiation film, make it from thesurface reflection of film to generate reflected probe beam; The intensity for detectingthe detection beam of reflection changes with time; Strength Changes based onmeasurement generate signal waveform; The thickness of film is determined based onsignal waveform.

申请人：Koninklijke Philips Electronics N.V.

地址：Groenewoudseweg 1 5621 BA Eindhoven NL

国籍：NL

代理机构：Deguelle, Wilhelmus H. G.

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