METHOD AND APPARATUS FOR EMBEDDING ABRASIVE PARTIC

专利名称：METHOD AND APPARATUS FOR

EMBEDDING ABRASIVE PARTICLES INTOSUBSTRATES

发明人：Zine-Eddine Boutaghou申请号：US12751586申请日：20100331

公开号：US201100279A1公开日：20110203

专利附图：

摘要：A dressing bars for embedding abrasive particles into a substrate at asubstantially uniform height. Spacing pads, hydrostatic and/or hydrodynamic fluid

bearing (air is the typical fluid) maintains a constant spacing and attitude between thedressing bar and the substrate. The fluid bearing permits the dressing bar to maintain adesirable stiffness between the lapping plate and the dressing bar. The bar geometryand fluid bearing design permits the bar to mitigate or compensate for the micrometer-scale and/or millimeter-scale wavelengths of waviness on the substrate, while maintaininga substantially constant clearance to uniformly embed the abrasive particle into thesubstrate.

申请人：Zine-Eddine Boutaghou

地址：North Oaks MN US

国籍：US

更多信息请下载全文后查看